Plasma Electronics, Second Edition: Applications in Microelectronic Device Fabrication

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Authors: Toshiaki Makabe, Zoran Lj. Petrovic
Publisher: CRC Press
Pages: 412
Language: english
Year: 2014
ISBN 10: 1482222051
ISBN 13: 9781482222050
Series: Series in Plasma Physics
Edition: 2
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Synopsis

Beyond enabling new capabilities, plasma-based techniques, characterized by quantum radicals of feed gases, hold the potential to enhance and improve many processes and applications. Following in the tradition of its popular predecessor, Plasma Electronics, Second Edition: Applications in Microelectronic Device...