Physics of Radio-Frequency Plasmas

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Authors: Pascal Chabert, Nicholas Braithwaite
Publisher: Cambridge University Press
Pages: 395
Language: english
Year: 2011
ISBN 10: 0521763002
ISBN 13: 9780521763004
Series: Unknown
Edition: Unknown
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Low-temperature radio frequency plasmas are essential in various sectors of advanced technology, from micro-engineering to spacecraft propulsion systems and efficient sources of light. The subject lies at the complex interfaces between physics, chemistry and engineering. Focusing mostly on physics, this...