Focused Ion Beam Systems: Basics and Applications

(4.6/5) - 301 ratings
Author: Nan Yao
Publisher: Cambridge University Press
Pages: 408
Language: english
Year: 2007
ISBN 10: 0521831997
ISBN 13: 9780521831994
Series: Unknown
Edition: 1
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Synopsis

The focused ion beam (FIB) system is an important tool for understanding and manipulating the structure of materials at the nanoscale. Combining this system with an electron beam creates a DualBeam - a single system that can function as an...