Film Deposition by Plasma Techniques

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Author: Dr. Mitsuharu Konuma (auth.)
Publisher: Springer-Verlag Berlin Heidelberg
Pages: 224
Language: english
Year: 1992
ISBN 10: Unknown
ISBN 13: 978-3-642-84511-6
Series: Springer Series on Atoms+Plasmas 10
Edition: 1
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Synopsis

Properties of thin films depend strongly upon the deposition technique and conditions chosen. In order to achieve the desired film, optimum deposition conditions have to be found by carrying out experiments in a trial-and­ error fashion with varying parameters. The...